交流信号检测的多壁碳纳米管湿度传感器模型(英文)

Model of Multi-Wall Carbon Nanotubes Humidity Sensor Based on AC Testing

为研究交流信号检测的多壁碳纳米管(MWCNTs)湿度传感器模型,通过扫描电子显微镜对传感器敏感薄膜(MWCNTs-SiO2薄膜)的孔隙结构进行观察,并使用表面积与孔隙(ASAP)分析系统对薄膜孔隙率进行分析.利用Debye方程对敏感薄膜中凝聚出液态水介电损耗的描述建立传感器模型.为了验证该传感器模型,制作了一种基于MWCNTs-SiO2的电导型湿度传感器,在100 kHz测试频率下,对不同相对湿度环境中的传感器电导值进行测试,利用测试结果与所建立模型进行拟合,发现R2大约为0.979,可见该模型可以用来描述传感器湿敏特性.

To study the model of multi-wall carbon nanotubes （MWCNTs） humidity sensor based on AC testing, the porosity structure of the sensing film （MWCNTs-SiO2 film） was observed by the scanning electron microscopy （SEM） , and the pore volumes in MWCNTs-SiO2 film at different pore radiuses were investigated by an accelerated surface area and porosimetry （ASAP） system. By describing the dielectric loss of the water condensed in those pores by Dehye relation, the sensor model was built. To verify the sensor model, one conductance type MWCNTs humidity sensor was presented and the sensor was tested in different relative humidity （RH） at the testing frequency of 100 kHz. By fitting the model with the exper- imental data, R2 is about 0. 979, which verifies that the model can be used to describe the sensor proper- ties.