微圆弧金刚石刀具刀尖圆弧的测量及评价

Tool Tip Arc Measurement and Characterization of Micro-Arc Diamond Tools

为实现对微圆弧金刚石刀具刀尖圆弧的评价,提出了一种基于高分辨率扫描电镜图像的评价方法,并对刀尖圆弧轮廓提取、轮廓曲线拟合、圆弧度评价等算法进行了研究.首先,运用Canny边缘检测算子提取刀尖圆弧图像的二维轮廓数据,并用移动最小二乘法对该数据进行拟合,使所提取轮廓光滑化;接着,建立了基于最小二乘准则的刀尖圆弧评价模型,并采用二次序列规划法对模型进行求解;最后,分析了轮廓拟合误差、测量不垂直度误差对刀尖圆弧评价结果的影响,并计算了刀尖圆弧半径及圆弧度不确定度值.实验结果表明所评价微圆弧金刚石刀具的刀尖圆弧半径为30.213μm,圆弧半径不确定度为351 nm,圆弧度为0.114μm,圆弧度不确定度为24 nm.由评价结果可以看出,本文所提出的方法可以实现微圆弧金刚石刀具刀尖圆弧纳米级精度的测量及评价.

To measure and characterize the tool tip arc of micro-arc diamond tools, an evaluation method based on high resolution scanning electron microscope image was brought out, and the edge extraction, edge fitting and the roundness characterization algorithms were also discussed. Firstly, Canny edge ex- traction method was adopted to detect the 2D edge profile of tool tip and moving least square algorithm was used to smooth edge profile. After that the arc characterization model of tool tip was established, and the characterization model was solved using sequential quadratic programming method. Finally, the fac- tors affecting tool tip arc characterization results were analyzed including profile fitting error and nonper- pendicularity error, and the uncertainties of tool tip radius and tool tip roundness were also calculated. Experimental results show that the tool tip radius of micro-arc diamond tools is 30. 213 μm with the un- certainty of 351 nm; the roundness is 0. 114μm with the uncertainty of 24 nm. From the characterization results it can be seen that the proposed method can measure and characterize the tool tip arc of micro-arc diamond tools with nano-meter precision.