MEMS振动传感器快速自动标定系统

Fast Automatic Calibration System for MEMS Vibration Sensors

针对MEMS振动传感器批量化标定要求,建立了一套MEMS振动传感器快速自动标定系统,可实现传感器静态和动态指标的快速多通道标定。首先介绍MEMS振动传感器的基本工作原理、静态以及动态数学模型,并根据静态参数和动态参数的标定要求,利用振动台、标准传感器、上位机电脑以及后台程序建立了MEMS振动传感器自动标定系统;通过数字编程接口,可以实现振动传感器的自动标定。最后,以中国电子科技集团公司第十三研究所研制MSA1000系列振动传感器作为试验对象,对传感器的偏值、标度因数、幅频及相频特性进行了标定和比对测试,充分验证了此种方法的效果和正确性,有效提高了MEMS振动传感器的标定效率。

According to the mass calibration requirements of MEMS vibration sensors, the fast automatic calibration system for the MEMS vibration sensor was built to achieve the fast multi- channel calibration of static and dynamic parameters. Firstly, the basic working principle and the static and dynamic mathematical models of the MEMS vibration sensor were introduced. Accor- ding to the calibration requirements of the static and dynamic parameters, the automatic calibra- tion system of the MEMS vibration sensor was built with the vibrating table, reference sensor, upper computer and background program. The automatic calibration of the vibration sensor was achieved through the digital programming interface. Finally, with MSA1000 series vibration sen- sors developed by the 13th research institute of CETC as the test object, the bias, scale factor, amplitude-frequency and phase frequency characteristics were calibrated and compared with the reference. The effectiveness and correctness of this method were fully verified, and the calibra- tion efficiency of the MEMS vibration sensor was improved effectively.