渐变折射率薄膜折射率轮廓的分层检测法

Measuring Profile of Inhomogeneous Films Using Method of Stratified Equivalence

对实际渐变折射率薄膜的折射率轮廓进行测量评价.从线性渐变折射率薄膜的折射率轮廓和反射率光谱之间的关系出发,采用反演技术结合梯度薄膜与渐变折射率薄膜的等效原理,对渐变折射率薄膜的折射率轮廓进行模拟测量,得到了实际镀制的渐变折射率薄膜的折射率轮廓.结果表明,使用该方法得到的折射轮廓对应的反射率曲线和实测反射率曲线直接的误差不超过0.4%.

The formulation between the reflectivity and the profile of inhomogeneous films is introduced.Then the profile is optimized by inset a small gradient layer,which is derived from the theory of equality between the gradient multilayer and inhomogeneous films.At last,it is successful to get the profile of inhomogeneous films in practice.It is shown that the error between the measuring curve and calculating based on the obtained refractive index is less than 0.4%.