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电弧-磁控复合沉积TiSiN涂层及其切削性能研究 被引量：3

Cutting Perform ance of TiSiN Coating Deposited With Combined Method of Arc Ion Plating and Magnetron Sputtering
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摘要 本文通过电弧离子镀一中频磁控溅射复合沉积的方法，采用独立的纯Ti靶和纯Si靶在YS8硬质合金基体上制备了TiSiN涂层。并研究了其化学含量、微观结构、硬度，以及切削45淬火钢时的切削性能，对TiSiN涂层刀具的市场应用具有积极的推动作用。
作者 李士鹏 邓建新 闫光远 程宏伟
机构地区 山东大学高效洁净机械制造教育部重点实验室
出处 《航空制造技术》 北大核心 2013年第14期72-77,共6页 Aeronautical Manufacturing Technology
基金 国家自然科学基金(51075237) 山东大学自主创新基金(2011JC001) 教育部博士点基金(20110131130002)资助
关键词 中频磁控溅射 电弧离子镀 切削性能 涂层刀具 复合沉积 硬质合金基体 微观结构 淬火钢
分类号 TG174.44 [金属学及工艺—金属表面处理]
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参考文献5

  • 1Yan P, Deng J X, Lian Y S, et al. Effect of depositing parameters on microstructures and properties of multi arc ion plating ZrTiN films. Surface Engineering, 2012, 28:17-23.
  • 2Hiroyuki H, Ayako K, Tetsuya S. Til-xAlxN, Til-xZrxN and Til-xCrxN films synthesized by the AIP method. Surface and Coatings Technology. 2000, 132: 76-79.
  • 3Hiroyuki H, Masahiro K, Tetsuya S. Effects of AI contents on microstructures of Crt_ ~AI~N and Zrt_~AI~N films synthesized by cathodic arc method. Surface and Coatings Technology, 2005, 200: 2409-2413.
  • 4Veprek S. Conventional and new approaches towards the design of novel super hard materials. Surface and Coatings Technology, 1997, 97: 15-22.
  • 5Kim K H, Park B H. Mechanical properties and oxidation behavior of Ti-Si-N films prepared by plasma assisted CVD. Advanced Materials, 1999, 11(17): 275-279.

同被引文献27

  • 1陈庆川,童洪辉,崔西蓉,刘晓波,耿漫,王经权.多功能复合离子镀膜机的研制[J].真空,2005,42(1):36-38. 被引量：1
  • 2VEPREK S, REIPRICH S. A Concept for the Design of No- vel Superhard Coatings [ J ]. Thin Solid Films, 1995,268 : 64.
  • 3LI S P, DENG J X, YAN G Y, et al. Effects of Nitrogen Flow- rates on Properties of TiSiN Coatings Deposited by Arc Ion Plating Combining with Medium-frequency Magnetron Sput- tering [ J ]. Refractory Metals and Hard Mater, 2014,42 : 108-115.
  • 4MEGE-REVIL A,STEYER P,CARDINAL S,et al. Correla- tion between Thermal Fatigue and Thermomechanical Pro-perties during the Oxidation of Multilayered TiSiN Nano- composite Coatings Synthesized by a Hybrid Physical/ Chemical Vapour Deposition Process [ J ]. Thin Solid Films, 2010,518:5932-5937.
  • 5CHAWL V, JAYAGANTHAN R, CHANDRA R. A Study of Structural and Mechanical Properties of Sputter Deposited Nanocomposite Ti-Si-N Thin Films [ J 1. Surface & Coatings Technolo~. 2010.204 : 1582 -1589.
  • 6YAZDI M, LOMELLO F, WANG J, et al. Properties of TiSiN Coatings Deposited by Hybrid HiPIMS and Pulsed-DC Mag- netron Co-sputtering[ J]. Vacuum,2014,109:43-51.
  • 7MAD Y,MA S L,XU K W. Influence of Si Content on Nano- structured Ti-Si-N Films Coated by Pulsed-d. c. Plasma En- hanced CVD [ J 1. Surface & Coatings Technology, 2004, 184 : 182-187.
  • 8CAMPS I, MUHL S, CAMPS E, et al. Tribological Properties of TiSiN Thin Films Deposited by Laser Ablation [ J 1. Sur- face & Coatings Technology,2014,255:74-78.
  • 9CHANG C L, LIN C T,TSAI P C, et al. Influence of Bias Voltages on the Structure and Wear Properties of TiSiN Coating Synthesized by Cathodic Arc Plasma Evaporation [ J]. Thin Solid Films,2008,516:5324-5329.
  • 10GUO C T, LEE D,CHEN P C. Deposition of TiSiN Coatings by Arc Ion Plating Process [ J ]. Applied Surface Science, 2008,254 : 3130-3136.

引证文献3

二级引证文献21

航空制造技术
2013年 第14期

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