基于真空羽流试验的洁净真空系统设计

Oil-free vacuum system design based on vacuum plume experiment

研制的洁净真空系统可用于真空羽流试验及热真空试验研究.详细介绍了真空系统的组成、方案设计及工作模式;计算了不同工作模式下的真空抽气时间;分别对罗茨泵机组、分子泵及低温泵进行了容器极限抽速测试,测试结果表明,满足技术指标;最后对真空容器压力维持能力进行了测试,测得容器平均压升率为0.111Pa/h,对应的平均漏气率为7.24Pa.L/s,真空容器达到了较高的工艺水平.真空系统有多种工作模式供选择,可根据试验需求及故障模式选取,增加了"真空羽流效应实验系统"运行的实用性和经济性.

An oil-free vacuum system for vacuum plume and thermal vacuum experiments was established.The composition of vacuum system,scheme design and working modes were described in detail.The vacuum pumping time under different working modes was calculated.The vessel ultimate pumping speed tests were conducted on the roots pump,molecular pump and cryopump,respectively.The test results show that the technical indexes of the instruments are attained.Finally,the pressure maintenance ability of the vacuum vessel was measured.The average pressure rise rate of the vessel is 0.111 Pa/h,corresponding to an average leakage rate of 7.24 Pa·L/s,which demonstrates that the vacuum vessel has achieved a high process level.According to the experimental requirements and the selection of failure mode,the vacuum system has several working modes to choose,which increases the practicality and economy of the vacuum plume investigation experiment system.