摘要
以Ba(OH)2溶液为电解液,分别采用交/直流源微弧氧化技术在工业纯钛板表面沉积BaTiO3薄膜,并对薄膜的物相组成、表面形貌及铁电性能进行了表征。结果表明:直流源和交流源模式下沉积的BaTiO3薄膜分别主要由四方相和六方相构成;薄膜表面均匀散布有孔径为几百纳米至几微米的孔洞,且存在裂纹;六方相BaTiO3薄膜需经长时间高温退火才可生成具有铁电性能的四方相BaTiO3,而直流源微弧氧化可直接生成BaTiO3铁电薄膜。
Taking Ba（OH）2 solution as eletrolyte, alternative current （AC） and direct current （DC） power microarc oxidation （MAO） technologies were used to deposite BaTiO3 films on industrial pure titanium plate, and the phase composite, surface morphology and ferroelectric properties of the films were characterized. The results show that the films deposited by DC /AC power microarc oxidation were mainly composed of tetragonal and hexagonal BaTiO3 phase, respectively. Holes with diameter of hundreds of nanometer to a few microns and cracks distributed uniformly on the films surface. The BaTiO3 film with hexagonal phase had not ferroelectric properties until it was annealed at high temperature for a long time, and the ferroelectric BaTiO3 film could be prepared directly by DC power microarc oxidation technology.
出处
《机械工程材料》
CAS
CSCD
北大核心
2013年第7期64-67,89,共5页
Materials For Mechanical Engineering
基金
中央高校基本科研业务费专项资金资助项目(2012ZZ0011)
关键词
微弧氧化
BATIO3
铁电薄膜
microarc oxidation （MAO）
barium titanate
ferroeiectric film
