摘要
研究了低压水射流辅助激光加工的方法,利用该复合加工方法对Al2O3陶瓷材料进行刻蚀加工。通过对比分析,系统研究了脉冲能量、脉冲宽度、重复频率等激光参数对Al2O3陶瓷常规激光刻蚀与低压射流辅助激光刻蚀后的表面微观形貌的影响。研究结果表明:这种利用了射流束的冲蚀作用的复合加工方法能够减少再铸层和微裂纹的产生,减少试样表面熔渣的堆积,复合加工的试样质量稳定性有很大的提高。
The paper studies on low-pressure water jet assisted laser processing, and etches Al2O3ceramics by using this method. A comprehensive study on the influence of laser processing parameters on surface quality of an Al2O3 ceramic sheet is presented. The surface quality of normal laser processing and low-pressure water jet assisted laser processing were comparative analyzed using a 3-D microscopy. Experiments proved that, the composite processing of low-pressure water jet assisted laser processing can obtain good surface quality, and lessen molten slags and thermal deformation, compared with the normal laser processing.
出处
《应用激光》
CSCD
北大核心
2013年第3期278-284,共7页
Applied Laser
基金
国家自然科学基金
激光烧蚀低压射流复合加工技术基础的研究资助项目(项目编号:51175229)
关键词
低压水射流
激光复合加工
陶瓷刻蚀
表面质量
low-pressure water jet
laser composite processing
etching ceramic
surface quality
