浅谈扫描电子显微镜的结构及维护

Structure and maintenance of scanning electron microscope

主要介绍了钨灯丝扫描电子显微镜和场致发射扫描电镜基本结构中的异同及性能的差异,并以HI-TACHI S-4700为例介绍了对扫描电子显微镜的维护工作。

This paper mainly describes the differences in structure and the comparison of performance between the tungsten filament SEM and the field emission SEM. Taking HITACHI S-4700 as a field emission SEM example, its daily maintenance is discussed.