摘要
针对真空系统复杂的故障现象,根据其工作原理和θ轴机构进行故障原因分析,总结了在无经验情况下进行仪器维修的方法。
On the basis of complicated fault phenomenon in vacuum system, the faults were analyzed according to working principle of vacuum system and mechanism of θ axle. The maintenance method under inexperienced conditions was summarized.
出处
《分析仪器》
CAS
2013年第4期94-96,共3页
Analytical Instrumentation
关键词
X射线荧光光谱仪
真空系统
故障分析
X-ray fluorescence spectrometer
vacuum system
fault analysis
