摘要
过去30多年来,对于CVD(化学气相沉积)涂层用于防护性应用方面的要求增长迅猛。通过提高工业涂层设备的可靠性,基体材料的持续优化,以及针对应用问题诸如前后处理等辅助工艺的集中解决方案等,相应的技术进步实现了从上世纪60年代的单一涂层发展到现今的复杂涂层系统。CVD技术已广泛应用于硬质合金切削刀具行业,同时也广泛用于需要特殊设计涂层材料系统的专业市场。如今的涂层可通过改变微观结构或掺杂不同的元素来进行改性,这使得CVD技术有能力满足众多的需求。这一切都可用改进的专业系统监控特殊前驱物质的沉积设备来实现。
The requirements of chemically vapor deposited （CVD） coatings for protective application has increased e- normously over the past 30 years. The progress from simple monolayer coatings of the 1960s to the complex coating systems of today were made possible through increased reliability of industrial coating equipment, continual optimization of engi- neering alloy as substrate material; and the integral approach to solve application problems including peripheral processes such as pre-and post-treatment operations. CVD technology is well known in the cemented carbide cutting tool industry, besides that there are a number of niche markets which ask for specifically designed coating material systems. CVD has the potential to fulfill many of these requirements as the coating applied today can be modified by either defined micro struc- tures or addition of doping elements. This can be done in many cases by using current deposition machines, which are modified with specific systems to monitor the special precursors.
出处
《工具技术》
2013年第7期33-36,共4页
Tool Engineering
关键词
CVD
复合涂层
沉积工艺
CVD
combined coatings
deposition process
