摘要
微电子制造技术的高速发展使微机电系统MEMS的应用迅速普及。本文以CPS120为例介绍数字压力传感器的应用,CPS120是电容式MEMS绝对压力传感器,在紧凑的封装中提供高精度气压测量功能,它同时还集成了温度传感器,适用于各种对成本敏感的消费电子产品和工业控制应用。
The rapid development of microelectronics manufacturing technology makes microelectromechanical systems MEMS applications rapidly growing popularity.The paper takes CPS120 as an example to introduce the application of digital pressure sensor,CPS120 is capacitive MEMS absolute pressure sensor,it provides high accuracy pressure measurement in a compact package,and it integrates temperature sensor.It is applicable to various cost sensitive consumer electronic products and industrial control application.
出处
《单片机与嵌入式系统应用》
2013年第5期34-36,40,共4页
Microcontrollers & Embedded Systems
