衬底温度对磁控溅射法制备的Ag/AZO绒面背反电极性能的影响

Effect of Substrate Temperature on the Properties of Textured Ag/AZO Back Electrodes Prepared by Magnetron Sputtering

通过优化薄膜硅基太阳能电池的背反电极,使背反电极表面出现均匀的类金字塔结构,能够增大入射光在结区的有效光程,提高光子的捕获率,进而会提高薄膜硅基太阳能电池的光电转换效率.本文采用磁控溅射技术在载玻片上制得Ag/AZO(ZnO∶Al)导电薄膜.在控制其它溅射参量为最优化的情况下,研究了衬底温度对Ag/AZO导电薄膜光电性能及其表面形貌的影响.研究表明:随着衬底温度的增加,薄膜的雾度在可见光范围内先增大后减小;当衬底温度为500℃时,雾度取得最大值,在可见光范围内平均达到了95%以上;电阻率随着衬底温度的增加逐渐增大,且衬底温度超过500℃时电阻率急剧增大.在综合考虑其光电性能的情况下,实验得到当衬底温度为500℃时,所获得的叠层薄膜表面雾度值最好且电阻率很小,这将有助于改善太阳能电池的性能.

By optimizing the back reflection electrode of the thin-film silicon-based solar cell, the back reflection electrode surface appears the homogeneous pyramid-structure, which can increase the effective optical-path of the incoming light, and the photon capture rate, thereby the photoelectric conversion efficiency of the thin-film silicon solar cells is improved. In this paper, the Ag/AZO （ZnO： A1） conductive films were prepared on glass substrates by magnetron sputtering. In the case of the other sputtering parameters being optimal, the photovoltaic properties and surface morphology of AZO/Ag of the different substrate temperatures were investigated emphatically. The study shows that the film haze factor in the visible region first increases and then decreases; when the substrate temperature is 500℃, the haze factor of the film is the maximum with an average of more than 95% in the visible range; the resistivity of the film increases gradually with the increase of the substrate temperature, and the resistivity increases quickly when the substrate temperature is higher than 500℃. Considering the optical and electrical properties of the conductive films, when the substrate temperature is 500, the surface haze value of the tandem conductive films is the best and its resistivity is very small, which will play a significant role in improving the performance of the solar cells.