大口径高精度四维调整工作台设计

Design of a large aperture high-precision four-dimensional adjustment table

为了解决大口径高精度光学元件加工和测量过程中的调整问题,研发了一台SWTZT-1400高精度四维调整工作台。文中以四维调整的坐标转换为基础,阐述了四维调整工作台的调整原理,并对大口径高精度四维调整工作台进行了设计。为保证工作台高效率、高精度和高稳定性的调整,工作台整体采用双层结构形式,调平采用八点支撑结构,并配置高可靠性的调心调平锁紧机构,该工作台的上台面直径为1400mm,其平面度≤0.01mm,x、y向的调心范围为±25mm,x、y向的调心误差为0.1μm,x、y向的调平范围为±3°,x、y向的调平误差为10″,可实现大口径高精度光学元件的加工、测量和精密修配中工件装夹位置和角度的精确微量调整,提高光学元件的制造和测量精度。

A SWTZT-1400 high-precision four-dimensional adjustment table was developed to solve the aligning and leveling problem during the manufacturing and measurement process of large aperture high-precision optical components. Based on the eoordinate transformation in four-dimensional adjustment process, the design and the principle explanation of the high-precision four-dimensional table are discussed in this paper. For realizing high efficiency, high precision and high stability of table＇s adjustment, the double level structure is adopted in the table, and eight point bearing and locking mechanism are used for leveling and high stability, respectively. The diameter and flatness of the top table of the four-dimensional adjustment table are 1 400 mm and 0.01 mm, respectively. The aligning and leveling ranges of the table are ±25 mm and ±3° in x direetion and y direetion, respectively. The aligning and leveling error of the table are 0.1 μm and 10＂ in x direction and y direction. The aeeurate adjustment for position and angle of the installation optical components during the manufacturing, measurement and preeision repairing of large aperture high-precision optical components may be realized for improving the manufacturing and measuring aecuraey of the optieal eomponents.