摘要
研究了不同热硫化条件下用纯Fe膜反应形成的FeS2多晶薄膜成分、结晶形态和电阻率的变化规律,结果表明,在400℃等温20~30h时,生成的FeS2比较充分,薄膜中的Fe,S含量接近FeS2计量成分,随硫化温度升高,FeS2晶粒明显增大,电阻率显著上升,当在400℃硫化充分形成FeS2晶粒后,继续延长等温时间对组织形态无明显影响。
Polycrystalline FeS2 thin films were prepared by thermally sulfurating iron layers sputtered on glass substrates. The effects of sulfidation temperature and time on composition, crystalline morphology and resistivity have been investigated under 80 kPa sulfur pressure. Test results shown that there was a nearly complete crystallization from iron into polycrystalline FeS2 under annealing 20-30h at 400℃. As a result of the sulfidation conditions above, the films could have approximate FeS2 stoichiometrical composition and display a uniform microstructure. With the elevation of sulfidation temperature, the grain size of FeS2 crystalline and the resistivity of film samples increased significantly. There was an insignificant effect of sulfidation time on crystalline morphology at 400℃ when FeS2 grains formed fully.
出处
《材料研究学报》
EI
CAS
CSCD
北大核心
2000年第4期379-383,共5页
Chinese Journal of Materials Research
基金
中国博士后科学基金!5925