高压脉冲电晕放电氮等离子体的分子束质谱诊断研究

Diagnosis of Nitrogen Plasma Generated by High Voltage Pulsed Corona Discharge via Molecular Beam Mass Spectroscopy

克服强电磁场干扰 ,以具有三级差分抽气系统的分子束质谱为手段 ,对线板式高压脉冲电晕放电N2 等离子体阴极板区的正离子成分进行了首次诊断研究。发现在各种实验条件下 ,N+ 离子流强度均显著大于N+ 2 ;N+ 及N+ 2 离子流强度随放电电压、放电频率升高而增大 ,随放电室气压变化则存在一极值。对N2 等离子体中所包含的主要基元物理

The positive ions in the near cathode region,generated by a wire plate high voltage pulsed corona discharge,were characteri zed via a molecular beam mass spectrometer,which is shielded from the serious electro magnetic interference.We found that the N + ion current is significantly larger than that of N + 2.The ion signals rise with increasing peak voltage and repetition rate of the pulsed discharge but show a maximum over the N 2 pressure range studied.The elementary physico chemical processes involved in the above N 2 plasma were discussed.