超精密机床的主动隔振系统研究

THE STUDY ON ACTIVE ISOLATION SYSTEM OF ULTRA-PRECISION TURNING MACHINE

本文以HCM_I型亚微米超精密车床为研究背景 ,在分析了机床结构与振动的基础上 ,建立了机床主动隔振系统的力学模型。通过几种作动器的性能对比选择了磁致伸缩作动器为执行器。通过反馈控制分析和实验 ,表明 :采用主动隔振可以明显提高机床减振性能 ,尤其对低频隔振效果较好。

Based on the analysis of the structure and vibration of HCM-I Submicro CNC Ultra-precision Turning Machine,the mechanical model of active vibration isolation system is set up in the paper.By comparing several actuator characteristics,magnetostrictive actuator is shown to be the best option.Through feedback control analysis and simulation,it is proved that the mechanical model is appropriate and the scheme of active vibration isolation system is feasible and effective.