提高LTCC叠片精度的工艺研究

Technology for Improving Stack Precision of LTCC

高精度叠片是实现低温共烧陶瓷(LTCC)基板完好制造的关键。结合半自动叠片机,研究了其叠片工艺中的对位图像以及CCD参数对叠片精度的影响,摸索出了高精度对位的对位图像以及较优的CCD参数,实现了5层叠片下的高精度对位(对位精度小于±12μm)。此外,还提出了一种实现叠片精度快速检测的新方法—"腔体-热切"方法。

The stack with high precision is a key technology for Low Temperature Co-fired Ceramic（LTCC）.Study the impact of aligning pattern and CCD parameters on stack precision using the semi-automatic stacker.The best aligning pattern and the optimized CCD parameters are obtained based on experiment.The high precision aligning with ±12 μm for 5 layers are achieved.In addition,put out a novel method to inspect the stack precision quickly,called cavity-cutting.