韧性薄膜/韧性基底体系弹性模量表征的新方法(英文)

A New Method for Identification of Elastic Moduli of Ductile Films on Ductile Substrates

使用有限元方法(FEM)分析了应变硬化的韧性薄膜/基底体系的锥形压痕过程.通过改变压入深度与薄膜厚度比,从0.01变化到0.85,得到了不同膜/基体系的力学响应,从而建立了压入深度、薄膜厚度和薄膜/基底弹性模量之间的无量纲关系.选取镍薄膜/低碳钢基底进行了纳米压痕试验,根据得到的无量纲关系,计算出了镍膜的弹性模量.同时与Sakai方法[1]得到的结果进行了比较,发现两者之间很吻合,证明该方法切实可行.

A series of nanoindentation tests with finite element method {FEM） are used to identify the e- lastic moduli of ductile thin films coated on ductile substrates with hardening behaviours. The mechanical responses of different film/substrate combinations on indentation depth are obtained by changing the ratios of the maximum penetration depth to film thickness from 0.01 to 0.85. The dimensionless relationships be- tween the penetration depth, film thickness, and elastic moduli of both ductile film and substrate have been established. Based on the dimensionless relationships the real nanoindentation tests have been carried out on the Ni thin film /mild steel substrate systems to extract the moduli of the Ni films from nanoindentation tests. The results are compared with those using the Sakai methodC13 and the good agreement shows that the method can be applied in practice.