空气弹簧隔振平台的振动传递率研究

Research on Vibration Transmissibility of the Air Spring Vibration Isolation Platform

目前,许多研究机构正在致力于隔振平台的研制,因为环境振动对超精密测量仪器及超精密加工设备的影响越来越不容忽视。振动传递率是衡量隔振系统隔振效果的重要参数,以某学院重中之重实验室的空气弹簧隔振平台为例,计算了其结构参数固有频率为10.0rad/s和阻尼比为0.0153,利用型号为CA-YD-181和CA-YD-189的压电式加速度传感器获取激励信号,经过频域积分,将信号转换为位移信号,利用单自由度振动系统模型求出了其振动传递率,与空气弹簧隔振平台实际工作情况很接近,为进一步的研究打下了基础。

A t present, many research institutions are studying vibration isolation platform,for the im- pact of environmental vibration on the ultra-precision measuring instruments and processing equipment should not be overlooked.The vibration transmissibility is the important parameters to measure the vibration isolation effect of vibration isolation system.It took the air spring vibration isolation platform in the most im- portant of one university for example ,and its structural parameter has been calculated.The natural frequency was 10.0rad/s and the damping ratio was O.O153.The excitation signal was obtained by using piezoelectric acceleration transducer, CA-YD-181 and CA-YD-189, and it was converted into the signal of displacement by frequency-domain integral method. Its vibration transmissibility was found via using single degree of freedom vibration system model,and it was close to the actual situation,which was to lay the foundation for the further research.