CCD同步协同技术在同步移相干涉术中的应用

Application of Multi-CCD-synergy Technology in Simultaneous Phase-shifting Interferometry

在同步移相干涉测量系统中,利用三部性能参数一致的CCD同步协同分别提取空间移相产生的干涉图,来提高干涉图的空间分辨率。选择多CCD系统中的一个CCD作为主机,产生同步信号来控制所有CCD同时工作,设计了以视频同步信号发生器CXD1217Q为核心的同步信号发生和外协同电路,提出了一种基于OPA692视频放大器的同步信号驱动和分发电路。

In simultaneous phase-shifting interferometry system based on three-bucket algorithm,three CCD cameras of the same characteristics are utilized to pick up the three space interferograms synchronously,so that the space resolution of the interferogram can be improved effectively.One of the multi-CCD-synergy system is selected as the master to associate the sync-signals with the others.A central circuit of sync-signals generation and sig nal-cooperation is designed by the video sync-signal generator CXD1217Q as the main IC.Meanwhile,a circuit of the drive and distribution of sync-signals is presented by using the video operation amplifier OPA692.