超精密机床气浮导轨的气体润滑研究

Research on Gas Lubrication Based on Aerostatic Slideway of Ultra-precision Machine Tool

在用超精密机床加工V沟槽等微结构时,气浮导轨是保证超精密加工精度和表面光洁度的关键部件之一。介绍气浮导轨结构及润滑方式的选择,对其拓扑结构进行设计,研究影响承载能力、刚度的因素,建立气体静态数学模型,在雷诺方程和达西定律等理论基础上,建立一维和三维润滑数学模型。从温度、气压、地基等方面综合考虑了V沟槽超精密加工机床气浮导轨的设计,可确保气浮导轨良好的润滑性能,从而确保机床良好的加工精度。

When the ultra-precision machine tool machining micro-structure of the V grooves,the aerostatic slideway is one of the key components, which ensures the high accuracy and surface smoothness in the ultra-precision machining. The choice of lubrication method and structure of aerostatic Slideway were introduced, and the topology structure of aerostatic slideway was designed. The affection factors on carrying capacity and stiffness were researched, and the aerostatic mathe- matical model was set up. The one-dimensional and three-dimensional lubrication mathematical models were established based on the theories of Reynolds equation and the Darcy＇s law. The design of aerostatic guideway for V groove machining of ultra-precision machine tool was considered synthetically in aspect of the temperature, gas pressure and foundation, which can ensure aerostatic slideway to have a good lubrication performance, in order to get high machining accuracy of machine tool.