飞秒激光在微加工领域的研究及其应用

Application and Development of Femtosecond Laser Micromachining

飞秒激光以其超短脉冲、超强峰值功率和高聚焦能力,能够实现超精细三维微加工的特点获得了广泛关注和深入研究,所以飞秒激光的微加工技术发展迅速。本文首先简要回顾了飞秒激光与透明和非透明材料之间相互作用的机理,然后详细综述了飞秒激光在透明材料和非透明材料上的超精细微加工,着重讨论了飞秒激光在光纤传感、光纤通信、光波导、耦合器和金属材料方面的应用,最后描述了飞秒激光微加工所面临的关键问题。

Researchers focus on the femtosecond laser micromchining with three - dimensional ultra --precision microstmctures due to ultra - short pulse, super peak power and high focus ability of the femtosecond, which makes the femtosecond laser mieromachining technology to develop rapidly. Firstly, the interaction mechanisms between the femtosecond laser pulse transparent and non - transparent materials were introduced. Next, the ultra - precision micmmachining of the fiber- optic sensorj fiber- optic communication, optical waveguide, coupler and metals with femtosecond was discussed in detail. Finally, we high_light the opportunities and the key problems of the femtosecond micromachining.