摘要
石英微机械陀螺敏感器件通常采用一体式音叉结构,具有较高的可靠性,但由于在敏感芯片中设计了挠性结构,挠性结构的参数及加工质量是影响器件可靠性的关键因素。分析了敏感芯片挠性结构在外力作用下的应力分布及结构缺陷对其影响,分析了其失效模式。试验结果验证了分析的准确性,分析结果可作为改进敏感器件可靠性的依据。
The quartz MEMS gyroscope generally uses a one-piece tuning fork structure and has a high reliability.However,a flexible structure is designed on the sensing chip,and the parameters and processing quality of flexible structure are the key factors that affect the reliability of the sensing device.The stress distribution of sensing chip is analyzed under the external force and the effect of the structural defect on the stress distribution is analyzed.Then the failure mode is also analyzed.The accuracy of the analysis is validated by using the test results.The obtained results can be used for improving reliability of sensing device.
出处
《压电与声光》
CSCD
北大核心
2013年第4期511-513,共3页
Piezoelectrics & Acoustooptics
关键词
石英
微机械
陀螺
敏感器件
可靠性
quartz
MEMS
gyroscope
sensing device
reliability
