静电悬浮转子微陀螺五自由度位置检测研究

Research on the 5-DOF Position Detection for a Micromachined Electrostatically Suspended Gyroscope

给出了一种基于微机电系统(MEMS)技术的静电悬浮转子微陀螺,为了实现对静电悬浮转子微陀螺转子的五自由度(5-DOF)悬浮控制,需要对转子进行五自由度位置检测,首先介绍了微位移检测原理,提出了一种基于频分复用技术和开关解调技术的微位移检测方法,设计了基于直接数字频率合成(DDS)技术的多频率信号发生器、前置放大器及锁相放大器组成的位置测试系统,位移检测电路的各项性能指标能满足静电悬浮转子微陀螺的五自由度控制需要。

It is presented in this paper a novel micromachined electrostatically suspended gyroscope（MESG） based on micro-electro-mechanical systems（MEMS） technology.In order to realize the five degree of freedom（5-DOF） levitation control of MESG,the position detection scheme is carried out.Firstly,the micro-displacement detection theory is presented;the micro-displacement detection method based on frequency multiplex and switched demodulation technique is proposed.The position detection system consisting of the multi-frequency generator,front amplifier and lock-in amplifier is designed based on the direct digital synthesizer（DDS） technology.The specifications of the displacement detection circuit can satisfy the 5-DOF control demand of MESG.