摘要
A fiber-optic relative-humidity （RH） sensor composed of multilayer of porous dielectric films is proposed. The transducer deposited on fiber end-face is multilayer coating consisting of nano-porous TiO2 and SiO2 films, which forms a low-fineness Fabry-Perot （F-P） filter with one of minimum reflections at about 1350- nm wavelength. The dielectric thin films realized by e-beam evaporation without ion-source assistance have columnar and porous structures, which exhibit sensitivity to RH change of environments. When the sensor is exposed to an environment of RH change from 10.9% to 92.8%, experimental results demonstrate 77.9-nm shift of characteristic wavelength.
A fiber-optic relative-humidity （RH） sensor composed of multilayer of porous dielectric films is proposed. The transducer deposited on fiber end-face is multilayer coating consisting of nano-porous TiO2 and SiO2 films, which forms a low-fineness Fabry-Perot （F-P） filter with one of minimum reflections at about 1350- nm wavelength. The dielectric thin films realized by e-beam evaporation without ion-source assistance have columnar and porous structures, which exhibit sensitivity to RH change of environments. When the sensor is exposed to an environment of RH change from 10.9% to 92.8%, experimental results demonstrate 77.9-nm shift of characteristic wavelength.
