矢流洁净工作台数值模拟

Numerical simulation of the vector flow clean bench

采用K ε紊流数学方程及壁面函数法 ,对矢流洁净工作台的速度场、浓度场进行了数值模拟 ,得出操作区内气流流动特性和污染物分布规律 ,给出优化尺寸 ,论证了矢流用于洁净工作台的可行性和优越性。

Adopting the K ε turbulent flow model and wall function, simulates the flow and contaminant concentration fields of a vector flow clean bench. Obtains the regularity in the flow characteristics and contaminant diffusion. Presents the optimised dimensions of a bench. Demonstrate the feasibility and applicability of the vector flow pattern for a clean bench.