摘要
光栅纳米测量卡精度高,动态测量范围广,广泛应用于现代几何量计量设备中。目前国内市场上的光栅测量卡主要来自于国外,价格昂贵,自主产品比较少。为了打破这一现状,设计了一种基于DSP+PCI的光栅纳米测量卡,通过预放大电路对光栅信号进行处理,采用TMS320F28335对处理的光栅信号进行细分处理,基于PCI接口芯片CH365与计算机相连,实现高精度、快速光栅纳米在线测量。实验表明,运用光栅纳米测量卡测量的位移达到了纳米级。
Grating nano measurement card,with its high precision and wide dynamic measurement range,is widely used in modern geometric measurement equipment.Currently,this card in the domestic market mainly comes from abroad.Our independent product is limited.Therefore,the price is high.This paper introduces a grating nano measurement card based on DSP＋PCI.The card uses a pre-amplifying circuit for processing of grating signal which will be subdivided by adopting DSP later,and then,based on the PCI interface chip CH365,the card is connected to computers to realize high precision and fast grating nanometer measurement online.Experiments show that,using the grating nano measurement card designed in this paper to measure displacement is able to achieve the level of nanometer.
出处
《电子测量技术》
2013年第6期100-104,共5页
Electronic Measurement Technology
基金
安徽省自然科学研究基金项目(11040606M113)
