紫外激光脉冲沉积法制备高温超导(Bi,Pb)_2Sr_2CaCu_2O_8薄膜的研究

Study of preparation conditions of high-temperature superconductor (Bi,Pb)_2Sr_2CaCu_2O_8 thin films by pulsed laser deposition

用紫外脉冲激光沉积技术在单晶衬底上制备高温超导(Bi,Pb)2Sr2CaCu2O8薄膜,系统研究了不同镀膜参数对薄膜结晶质量的影响,获得了优化的镀膜工艺。并在较低温沉积、高温退火,以及高温沉积两种工艺下均获得了具有c轴取向、无杂相及无挥发(分解)的(Bi,Pb)2Sr2CaCu2O8薄膜。相比于高温沉积,低温沉积、高温退火制备的薄膜结晶质量更好。

In this paper,high-TCsuperconducting compound（Bi,Pb）2Sr2CaCu2O8thin films were prepared using pulsed laser deposition（PLD）technique.The influences of deposition conditions on the crystallization of the films were investigated systematically,and the optimized preparation conditions were worked out.For both low deposition temperature and high deposition temperature cases,the homogeneous,single-phased（Bi,Pb）2Sr2CaCu2O8films of c axis orientation were obtained reproducibly.In comparison to the case of high deposition temperature,the crystallization of the film grown at low temperature（and annealed at high temperature） was better.