便携式真空计校准装置

Novel Type of Portable Vacuum Gauge Calibration Apparatus

为了解决许多应用领域对真空度的现场校准需求,研制出便携式真空计校准装置。采用直径为200mm的球形容器作为校准室,用两台不同量程的电容薄膜真空计作为参考标准。为实现宽量程校准,装置集成了静态比对法、静态膨胀法及动态流量法三种校准方法。实验结果证实该装置的校准范围可达1×105~4×10-6Pa,合成标准不确定度为1.3%~4.7%。装置的外形尺寸为450mm×400mm×750mm,总重量小于40 kg。总之,该装置具有体积小、重量轻、便携和成本低等优点。

A novel type of portable vacuum gauge calibrator, with the technical advantages including small size, light weight, and low cost, was developed to meet the technical demands of the real time calibration in a variety of applications. The newly-developed vacuum gauge calibrator mainly consists of a spherical vacuum chamber, 200mm in diameter, in which two capacitance diagram gauges（CDG）with different ranges were used as the reference standards. Three calibration methods, including the static comparison method, static expansion method, and dynamic throughput method, were inte- grated in the calibrator to achieve the wide range calibration. The test results show that the calibration range reachesl × 10^5 Pa - 4 × 10^-6 Pa with a standard uncertainty of 1.3% -4.7%. The size and total weight of the calibrator were re- duced to 450 mm × 400 mm× 750 mm, and 40 Kg, respectively.