离子束刻蚀高基频石英谐振器的研究与应用

Research and applications of ion beam etching high fundamental quartz resonantor

本文介绍了离子束刻蚀设备的性能及最佳工作参数的选择,石英谐振器设计,频率调整和封装形式,以及等效参数测量,振动冲击试验和储存老化试验。最后介绍了高基频石英谐振器在低噪声微波振荡器、调频振荡器和宽带滤波器中的应用,取得了满意的结果。

This paper presents the performance of ion beam etching machine and selection of optimal operation parameiers, quartz resonantor design, frequencyadjustment, packged form, equivalent parameter measurement, vibration and shocktest and store age experiment. Finally, applications of high fundamental frequencyquartz resonantor in low noise microwave oscillator, FM crysial oscllator andbroadband crystal filters were introduced in the paper. Results are satisfactory.