电子背散射衍射试样的制备技术

Preparation of Sample for Electron Backscattered Diffraction

电子背散射衍射试样的制备质量对其成像效果有重要的影响。电子背散射衍射试样的制备方法已由传统的机械抛光、机械-化学抛光和电解抛光发展到离子减薄、聚焦离子束和最新的截面抛光等。介绍了工业纯铁和PbTiO_3微米粉末电子背散射衍射试样的制备方法。

The preparation quality of electron backscatter diffraction （ EBSD ） sample will exert a significant influence on the imaging effect .The methods of preparing EBSD sample have developed from conventional mechanical , mechanical-chemical and electrolytic polishings to ion thinning , focused ion-beam and cross section polishing .The examples of preparing EBSD samples of pure iron and micro-level PbTiO 3 powder were introduced .