摘要
为了提高反应等离子喷涂纳米TiN涂层的致密性、消除涂层内的微观缺陷,在大气、氩气氛和真空中对其进行了热处理。用XRD、SEM、TEM分析了纳米TiN涂层热处理后相组成及组织结构的变化,测试了处理后涂层的结合强度和孔隙率。结果表明:纳米TiN涂层在大气和氩气氛中,于600℃开始发生分解和氧化;真空环境下加热,涂层相组成不发生变化。在大气中600℃加热处理后,TiN涂层中微裂纹愈合,孔隙率降到原来的70%,结合强度基本不变。大气中1000℃热处理后,晶粒尺寸仍为100～200 nm。
In order to improve the density of the TiN nano-coatings, to eliminate the micro-defects within the coatings and to change the stress state, post-heat treatments in the atmosphere, the argon atmosphere and vacuum were carried out. XRD, SEM and TEM were used to investigate the change of phase composition and microstructure of TiN coatings after heat treatment. The properties of the TiN coatings after heat treatment were tested. The results show that the TiN coating is decomposed and oxidized when the temperature is hi 600 ℃ in the atmosphere and the argon atmosphere while the phase composition of the TiN coating heat-treated in vacuum gher than does not change. The micro-cracks in the coating are healed after 600 ℃ treatment in the atmosphere, the porosity of the TiN coating decreases to 70% of that of the coating before treatment, and the bond strength of the TiN coating almost does not change. The size of grains is 10G- 200 nm after the 1000 ℃ treatment in atmosphere
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2013年第8期1711-1714,共4页
Rare Metal Materials and Engineering
基金
国家自然科学基金(50772028
51102074)
