微操作中球基对象的近场声悬浮与旋转驱动研究

Near Field Acoustic Levitation and Rotating Actuation of Spherical Objects in Micromanipulation

针对微操作中圆球类对象的悬浮与操纵问题,从推导圆球的超声波近场声悬浮高度公式入手,确定了影响悬浮高度的主要因素。制作了带有凹球面工具端的专用换能器,实现了圆球的近场声悬浮。进而构建偏心式气动驱动系统,进行了转速与气压、偏心距、悬浮高度及扰动关系的实验。结果表明:出气孔气压是影响转速的主要因素,而偏心距对转速的影响较小;随着悬浮圆球转速增加,悬浮高度降低,扰动加大。

To realize levitation and actuation of solid sphere objects in micromanipulation process, we deduced the formula describing levitation height of near field acoustic levitation. The main influ- ence factors on levitation height were proclaimed. Then, specialized transducer with concave spherical tool attached were designed and manufactured. The near field acoustic levitation was proved through a series of experiments. At last, an eccentric pneumatic drive system was established to study manipu- lative performance of the solid sphere. The influences of air pressure, offset, levitation height and disturbance on rotational speed were all tested. The experimental results show that air pressure is the major impact factor for rotating speed, while the offset distance is the minor one. As speed increases, the levitation height decreases and perturbation intensifies.