摘要
研究了一种高温质子交换制备铌酸锂光波导的工艺技术,质子源是稀释的苯甲酸熔融液,通过提高蒸气压的方法实现了350℃质子交换,X线衍射测试表明波导层具有单纯的α相结构。采用该技术实验制备了铌酸锂Y分支波导,报告了波导单模特性的测试判断方法,研究了控制波导单模传输的工艺环节。测试表明,试制样品在1 310nm和1 550nm波长下具有良好的单模传输特性。
Experimental research of a high-temperature proton-exchanged LiNbO3 optical waveguide fabrication technology is carried out. The proton exchange source is diluted benzoic acid. The proton exchange at 350 ℃ is achieved by a process of improving the vapor pressure. The X-ray diffraction measurements show that the waveguide layer is uniform a-phase structure. LiNbO3 Y-branch waveguide is fabricated with this technology. The waveguide single-mode characteristic test judgment method and the technology eoncerning the controlling of waveguide single-mode transmission are also studied. The test shows that the trail sample has good single-mode transmission characteristics in 1 310 nm and 1 550 nm wavelength.
出处
《光学仪器》
2013年第4期90-94,共5页
Optical Instruments
基金
国家自然科学基金资助项目(61077042
60677032
60967003)
上海市重点学科(第三期)资助项目(S30502)
关键词
导波光学
铌酸锂波导
高温质子交换
相位调制器
guided wave optics
LiNbO3 waveguide
high-temperature proton-exchanged
phase modulator