热处理气氛对溶胶凝胶法制备CuAlO_2薄膜的影响

Effect of annealing atmosphere on preparation of CuAlO_2 films by sol-gel method

采用溶胶凝胶法,通过控制热处理气氛在石英玻璃基片上制备了光电性能优良的CuAlO2薄膜,研究了氧气和氮气对CuAlO2薄膜制备的影响。结果表明,CuAlO2薄膜的制备先后经历了凝胶膜的热分解、无定形薄膜、固相反应、CuAlO2形核与长大4个过程。固相反应阶段前通氧气,能够促进中间产物CuO的生成,之后通氮气可以使中间产物CuO与CuAl2O4发生固相反应生成CuAlO2,最终制备的CuAlO2薄膜结晶状况良好、晶粒较大,表面均匀致密,没有孔洞,电阻率为250Ω.cm,薄膜在700 nm处的透过率为75.5%。

CuAlO2 films were prepared on quartz by sol-gel method using controlling annealing atmosphere. The effects of oxygen and nitrogen on the fabrication of CuAIO2 films were investigated. The results indicate that there are four processes in preparing CuAIO2 films, including the thermal decomposition of gel films, the amorphous films, the solid phase reaction, and the nucleation and growth of CuAIO2. Before the solid phase reaction, oxygen can promote the generation of an intermediate product CuO. However, CuAIO2 should be obtained by the reaction of CuO and CuA1204 in nitrogen. The CuAIO2 films with good performance have been fabricated by using oxygen as annealing atmosphere at low temperature and then using nitrogen at high temperature, whose resistivity reaches 250 ~ ~ cm, and the transmittance at 700 nm is 75.5%.