溶胶-凝胶法制备FTO透明导电膜

Making of FTO transparent conducting film by sol-gel process

介绍了采用溶胶－凝胶法制备ＳｎＯ２掺杂Ｆ的透明导电膜（简称ＦＴＯ膜）的实验方法，并讨论了加水量、掺杂量、ｐＨ值及热处理条件对膜可见光透过率及膜电阻率的影响。实验表明，水：醇为０．２５～１．５，Ｆ：Ｓｎ为０．２６～１，ｐＨ值为１．５～３，热处理温度为４００～６００℃，可得到透明导电性良好的ＦＴＯ透明导电膜。甲酰胺可以抑制醇盐水解，提高缩聚速率并避免薄膜干燥开裂。

The experiment method on making SnO2, doping F transparent conducting film(simplified as FTO) by sol-gel process is introduced in this article. The influence of the amount of water and dopant, PH value and heat treatment conditions on the transparency to visible ligh and resistivity of the film is also discussed. The experiment shows that the hight quality FTO transparent conducting film can be obtained by the following conditions: the ratio of water to alcohol (bulk)0.25～l.5, F to Sn 0.26～l; pH value 1.5～3 and the temperature of heat treatment 400～600℃. It also shows that methylamide can restrain the hydrolysis of alcohol salt, increase the rate of condensation polymerization and keep the film from dry crack.