改良西门子法生产多晶硅精馏工艺的改进

Improvement on Rectification Process of Polycrystalline Silicon by Improved Siemens Process

改良西门子法是目前国内外多晶硅厂家最常用的方法,对提纯三氯氢硅的三塔精馏工艺进行改进。结果表明,改进后的四塔精馏工艺可以进一步降低三氯氢硅中硼、磷等杂质的含量,最终精馏塔顶馏出物高纯三氯氢硅纯度达到99.999%。

Improved Siemens process was widely used by polycrystalline silicon manufacturers home and a- broad. The trichlorosilane distillation process comprised of three rectification towers was improved. The results show that boron and phosphorus contents in trichlorosilane are further reduced by improved four rectification towers distillation process. The purity of final product of high-purity trichlorosilane can reach 99. 999%.