He-Ne激光器功率调谐位移传感激光器

Displacement sensing He-Ne laser based on intensity tuning with λ/8 accuracy and self calibration

阐述了一种新型的He Ne激光位移传感器 ,具有自校准功能以及没有原理上的误差。利用频率分裂技术 ,将一个纵模间隔分为 4个宽度相等的区间 ,在这 4个区间内激光器具有不同的光功率输出。当一个频率移动过这样的一个区间 ,相当于激光器的一个腔镜移动了λ/ 8。可移动的反射镜与被测工件相连。这样 ,一支He Ne激光器变成了一个不用干涉现象的位移传感器 ,其测量范围可达 10mm ,测量精度可达 0 .0 79μm ,并具有判向的功能。

The principle is presented and demonstrated of using a single He Ne laser to sense displacement without nonlinear error in principle,and with function of self calibration. By using frequency splitting technology,we could separate a mode interval into four equal width ranges with different intensity characteristics. One cavity mirror of the laser moves λ /8 along the laser axis when a laser frequency crosses one such range. The moving mirror contacts with and is moved by the object to be measured. Thus the He Ne laser becomes a displacement sensor without using interference phenomenon which works with accuracy of 0.079μm,10mm measuring range,and function of distinguishing direction.