激光双法-珀干涉纳米测量系统总体设计

Design of a nano-measurement system based on dual Fabry-Perot interferometer

设计了一套集光、机、电为一体的新型纳米测量系统 :以激光为光源、双法 珀干涉仪及轻拍式探针为纳米传感部件、以柔性铰链机构的微动工作台为纳米扫描测试系统 ,并采用计算机数字PID实时控制处理 ;提出了通过测量双法 珀干涉仪透射光强基波幅值差或基波等幅值过零时间间隔的方法进行纳米测量的理论基础 ;理论分析了检测探针振动的方法 ;给出了基于柔性铰链机构的微动工作台的有限元设计新方法 ;设计了以电容传感器为精密位置反馈的PID闭环控制系统 ,解决了压电陶瓷等元件对系统造成的非线性影响 ;对系统误差进行了分析。

A new nano-measurement system with laser, dual Fabry-Perot interferometers (DFPI), tapping stylus, flexure hinge stage and dig ital PID real-time computer control system is systematically designed. The theo retical basis of the nano-measurement system, using the measurement of amplitud e difference or equal amplitude time interval of DFPI transmission wave, is prop osed. The method of detection of tapping stylus vibration is theoretically analy zed. The finite element analysis method of small distance stage based on flexure hinge structure is proposed. The digital PID closed loop control system with th e feedback signal of capacitance position sensor is applied, the system nonlinea r influence caused by piezoelectricity element was solved. Finally, system error is analyzed.