摘要
为了对微机械谐振传感器的振动信号频率进行读出及短期稳定度分析,文中以静电驱动的某微机械振动双框架陀螺为例,介绍了频率调制解调的接口信号读取方法,并利用频率计和软件插件对振动频率进行了采样,最后利用Al-lan方差分析了频率的短期稳定性。利用介绍方法测得实验室制作的微机械振动陀螺驱动模态谐振频率为13.552 kHz,7 min内频率偏差在±10 ppm(1 ppm=10-6)以内,稳定度达到应用要求。
In order to readout the resonance frequency signal and analyze the frequency stability in short time for MEMS reso- nant sensor, this paper introduced the principle of frequency modulation, and un -modulation and then made use of this principle to readout the output signal of a double frameworks gyroscope. Meanwhile, a frequency counter and software plug - in block were used for data acquisition, short time frequency stability analysis was finished by Allan error method. The experiment shows the resonance frequency of double frameworks gyroscope is 13. 552 kHz for drive mode and the frequency accuracy of the close - loop self oscilla- tion system is about ±10 ppm in 7 minutes.
出处
《仪表技术与传感器》
CSCD
北大核心
2013年第7期14-16,共3页
Instrument Technique and Sensor
基金
南京信息工程大学科研启动基金(基金号:20110440)
