摘要
为了提高位移测量的精确度,提出了一种基于光反馈自混合干涉技术的位移测量方法。采用梯度最优算法分析和处理自混合干涉信号,达到数据理论的最佳拟合,实现微位移的精密测量,并通过设计算法对外部物体的运动轨迹进行重构。提出的传感器可用于亚微米级位移的测量和控制,并给出了PZT位移的实验结果。
For improving displacement measurement accuracy, a new method based on optical feedback self - mixing interfer- ometry was proposed. This paper aimed to employ this technology to perform precision displacement measurement, analyzing and processing the self-mixing interference signal by the gradient-based optimization algorithm to achieve best data - theoretical fitting. In addition, the vibration trace of the target could be reconstructed with high accuracy. The proposed 10 sensor can be used in the sub-micron displacement of measurement and control, and the experiment result of displacement measurement of bimorph PZT was presented.
出处
《仪表技术与传感器》
CSCD
北大核心
2013年第7期17-19,28,共4页
Instrument Technique and Sensor
关键词
位移测量
半导体激光器
光反馈自混合干涉
梯度最优算法
displacement measurement
semiconductor laser sensor
optical feedback self-mixing interferometry
gradient-based optimization algorithm
