X射线荧光光谱仪及其分析技术的发展

Development of X-ray Fluorescence Spectrometer and Its Analysis Technology

按照获得和分辨特征X射线荧光光谱的方式,X射线荧光光谱仪可以分为波长色散X射线荧光光谱仪(WDXRF)和能量色散X射线荧光光谱仪(EDXRF)两大类。依照这一分类,论述了X射线荧光光谱仪在设备装置和配套方法方面的新状况。X射线荧光光谱仪整机现在向着小型化、智能化、多功能方面发展,仪器各部件也随着研究的深入而得到了更进一步地改进,在这一基础上,仪器可分析元素的含量范围得到了拓展,方法也得到了丰富。目前,X荧光光谱仪开发了微区面分布的元素成像分析方法、高级次谱线分析方法、薄膜分析方法等新的方法,对这些新方法作以介绍,同时也对基本参数法(FP法)的新近发展作了说明。

According to obtaining and distinguishing ways of characteristic X-ray fluorescence spectrum,X-ray fluorescence spectrometer can be divided into the wavelength dispersive X-ray fluorescence spectrometer（WDXRF） and energy dispersive X-ray fluorescence spectrometer（EDXRF）.In this paper,according to this classification,equipments and supporting methods of the X-ray fluorescence spectrometer were discussed.X-ray fluorescence spectrometer is developing toward miniaturization,intelligence and multifunction now;components of the equipment have got further improvement with the development of research;the instrument analysis element content has also been expanded,new analysis methods have been developed.At present,the X fluorescence spectrometer has developed the micro-area elemental distribution image analysis（image-XRF,iXRF）,the senior time spectrum line analysis method,the film analysis method and so on.At last,the new methods were introduced,and the latest development of the basic parameters method（FP method） was also described.