一种智能式光栅莫尔条纹信号800细分与计数新方法

A New Principle of 800 Subdividing and Counting about the Grating Moire Signal with Intelligence

本文提出了一种采用综合模似/数字技术以软件取代硬件实现和提高系统性能的微控制技术来实现对光栅莫尔条纹的800细分与计数方法,其特点是:分辩率高、稳定性好、集成度高、调整简单及智能化与仪器化。采用软件细分、计数及误差修正,可适应不同刻线的光栅尺与分辩率的要求。本方法将对光栅尺在超精密测量及超精密加工等领域中应用起到重要的作用。

A new principle of 800 subdividing and counting about the grating moirc signal with intelligence is proposed. Incorporating analog-, digital-and computer-control techniques. the system with this principle is improved greatly in resolution, stability, integration, ease of adjustment, intelligence and instrumentation by substituting the hardware with the software. It is suitable for any number of lines grating scale and resolution by software subdividing, counting and error correcting. It would play an important part in the field of the application of the grating to the high accuracy measuring and processing.