期刊文献+

一种采用嵌套斩波技术的Σ-Δ调制器的设计 被引量:1

The Design of Nested-Chopper Σ-Δ Modulator
下载PDF
导出
摘要 针对MEMS传感器输出电压小并且频率低的特点,设计了一种低噪声嵌套斩波Σ-Δ调制器。该调制器采用单环积分器级联前馈(CIFF)结构与嵌套斩波技术结合,降低了传感器接口电路的低频噪声,并减小了CMOS电路中斩波开关引入的残余失调电压。仿真结果表明,提出的嵌套调制器可以有效抑制低频噪声。采用嵌套斩波Σ-Δ调制设计,在100 Hz信号带宽内,调制器最高信噪比达到109 dB,即17.8 bits的有效位数,满足了MEMS传感器低频微弱信号检测的要求。 A low-noise sigma-delta ( ∑-△ ) modulator, which uses nested-chopper technique, is designed for MEMS sensor with low-frequency weak output voltage. The proposed modulator combines cascade integrators feed forward (CIFF) architecture with nested-chopper technique. The inherent low frequency noise in the sensor interface is elim- inated, and the residual offset introduced by CMOS chopper switches is also reduced. Simulation results show that the nested-chopper ∑-△ modulator presented can restrain the low-frequency noise. The nested-chopper∑-△ modulator achieves a peak signal-to-noise ratio of 109 dB over a bandwidth of 100 Hz, equaling to a resolution of 17.8 bits, satisfying the requirement of MEMS sensor with low-frequency weak output voltage.
出处 《传感技术学报》 CAS CSCD 北大核心 2013年第6期845-850,共6页 Chinese Journal of Sensors and Actuators
基金 国家863项目课题支持项目(2012AA040402 2013AA041109) 国家973项目课题支持项目(2011CB309501)
关键词 MEMS传感器 信号处理 嵌套斩波 Σ-Δ调制器 微弱信号 MEMS sensor signal processing nested-chopper ∑-△ modulator weak signal
  • 相关文献

参考文献16

  • 1Massimo P, Michele D, Federico B, et al. Smart Flow Sensor With On-Chip CMOS Interface Performing Offset and Pressure Effect Copensation[ J]. IEEE Sensors Journal ,2012,12(12) :3309-3317.
  • 2范军,黑勇,陈铖颖.一种采用斩波-稳零技术的低功耗Delta-Sigma调制器的设计[J].微电子学与计算机,2011,28(11):76-80. 被引量:4
  • 3Christian C E, GABOR C T. Circuit Techniques for Reducing the Effects of Op-Amp hnperfections: Autozeroing, Correlated Double Samping,and Chopper Stabilization[ J]. Proceedings of the IEEE, 1996,84( 11 ) : 1584-1614.
  • 4姚镭,郝跃国,李铁,熊斌,王跃林.用于MEMS红外传感器的集成低噪声CMOS接口电路设计[J].传感技术学报,2007,20(10):2203-2206. 被引量:5
  • 5柴旭朝,顾晓峰,戴欢,苏小波,于宗光.低噪声低功耗微电容读出电路的优化与设计[J].传感技术学报,2010,23(8):1102-1105. 被引量:1
  • 6Christian M ,Qiuting H. A Low-Noise CMOS Instrumentation Amplifier for Thermoelectric Infrared Detecto[J]. IEEE Journal of Solid-State Circuits ,1997,32(7) :968-976.
  • 7Ying H C,Chung Y W,Tsai C Y. Chopper-Stabilized Sigma-Delta Modulator[ C ]//Processings IEEE International Symposium on Circuits and Systems, 1993,2 : 1286-1289.
  • 8Chen H L,Chen P S,Chiang J S. A Low-Offset Low-Noise Sigma- Delta Modulator With Pseudorandom Chopper-StabilizationTechnique[ J]. IEEE Transactions on Circuits and Systems,2009, 56(12) :2533-2543.
  • 9Liu S H, Kuo C H. Nested Chopper Deha-Sigma Modulator[ P]. United States Patent, US 6639532 B1. 2003-10-28.
  • 10拉扎维.模拟CMOS集成电路设计[M].陈贵灿,程军,张瑞智,等译.西安:西安交通大学出版社,2008:175-178.

二级参考文献27

  • 1[1]Lenggenhager R,Baltes H and Elbel T,Thermoelectric Infrared Sensors in CMOS Technology[J],Sensors and Actuators A,37-38(1993) 216-220.
  • 2[2]Muller M,budde W,A Thermoelectric Infrared Radiation Sensor with Monolithically Integrated Amplifier Stage and Temperature Sensor[J],Sensors and Actuators A,54(1996) 601-605.
  • 3[3]Oliver Andrew D,Wise Kensall D,A 1024-Element Bulk-Micromachined Thermopile Infrared Imaging Array[J],Sensors and Actuators A,73(1999) 222-231.
  • 4[4]Andri Schaufelbuhl,Schneeberger N,Munch U,Uncooled Low-Cost Thermal Imager Based on Micromachined CMOS Integrated Sensor Array[J],IEEE J.MEMS,2001,10:503-510.
  • 5[5]Enz C,Temes C,Circuit Techniques for Reducing the Effects of Op-Amp Imperfections Autozeroing,Correlated Double Sampling,and Chopper Stabilization[J].Proc IEEE,1996; 84(11):1584-1614.
  • 6[6]Christian Menolfi and Qiuting Huang,A Low-Noise CMOS Instrumentation Amplifier for Thermoelectric Infrared Detectors[J].IEEE J.of Solid-State Circuits,July 1997,32:968-976.
  • 7[8]Krummenacher F,Joehl N,A 4-MHz CMOS Continuous-Time Filter with On-Chip Automatic Tuning[J],IEEE Journal of Solid-State Circuits,23(3):750-758,June 1988.
  • 8Yazdi N,Ayazi F,Najafi K.Micromachined Inertial Sensors[J].Proceedings of the IEEE,1998,8(86):1640-1659.
  • 9Maenaka K.MEMS Inertial Sensors and Their Applications[C]//2008,The 5th International Conference on Networked Sensing Systems (INSS2008).2008:17-19.
  • 10Wu J F,Fedder G K,Richard C K.A Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50-μg/√hz Monolithic CMOS MEMS Accelerometer[J].IEEE Journal of Solid-State Circuits,2004,5(39):722-730.

共引文献9

同被引文献12

引证文献1

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部