基于光纤光栅输出光强检测的压力传感器

Development of FBG pressure sensor based on intensity readout

为避免布拉格光纤光栅温度与应力测量时的交叉敏感问题,文中提出一种基于微机电加工工艺的沙漏型FBG结构,通过各向同性腐蚀改变包层厚度,使其再受压力时光栅间距连续非均匀变化,导致反射带宽展宽,而温度只使中心波长漂移使带宽展宽很小,通过检测输出光强的大小间接测量压力大小,有效避免温度与应力的交叉敏感问题。

FBG pressure sensor in sandglass shape is proposed to avoid the cross-sensitivity problem with the temperature and strain applied in FBG using application. The pressure gradient is applied the fiber coat when it＇s stretched, which forces the bandwidth broadened of reflected wave only with strain not temperature. Through detecting the reflected output power, the effects from tension and temperature will be seperated.