摘要
重点讲述半导体工厂冷水系统中的水蓄冷及设备冷却水预冷两个节能项目;简单介绍相关设备涉及的其他节能项目,同时介绍冷水系统相关设备的节能管理,以供各位同行参考。
This article will focus on telling semiconductor factory in cooling water system of water storage and cooling water cooling two energy-saving projects. Introduce other energy conservation projects the related devices. Energy management related equipment cooling water system is introduced at the same time, for reference.
出处
《洁净与空调技术》
2013年第3期38-46,共9页
Contamination Control & Air-Conditioning Technology
关键词
半导体工厂
冷水系统
节能管理
Semiconductor plant
Chilled water system
Energy-saving management.
