摘要
针对单向垂直流洁净室内,受工艺设备影响导致的气流偏移、无效气流现象进行综合分析,探讨在洁净室设计和施工过程中所要考虑的因素以及运行阶段气流二次调整的方案,使洁净室形成良好的气流流型,并能更好地满足实际生产的需要。
An analysis of unidirectional Vertical airflow in cleanroom was made, which can skew random and blow unefficiently by the influence of process equipment. Discussed the major issues that should be considered in the cleartroom design and Construction phase and adjustment plans of airflow in cleanroom operation phase, so that airflow could meet the production requirement.
出处
《洁净与空调技术》
2013年第3期61-63,共3页
Contamination Control & Air-Conditioning Technology
关键词
洁净室
气流组织
工艺设备
调整
微环境
Clean room
Air flow
Process equipment
Adjustment
Mini-environment
