摘要
依据青海省西宁市经济开发区某多晶硅项目CVD还原车间设计为背景,针对该多晶硅项目车间建筑构造和所处地理位置的气候特点、CVD还原车间厂房的生产类别、CVD还原区的工艺要求和生产过程散发的有害气体种类及有害气体的特性,详细介绍了CVD还原车间的通风空调系统设计特点。最后,指出了普通建筑围护结构很难保证房间正压要求的实际运行问题,希冀能对类似项目的设计提供参考。
Based on the design of a CVD recovery workshop in the Economic Development Zone, Xining, Qinghai province, the characteristics of design of ventilation and air-conditioning of the same was described in detail, focusing on its structure, geographic place and weather conditions, type of production, process requirements, and types and features of hazard gases emitted during production. The pressurization requirements of the workshop was hardly maintained by ordinary partition structures, which was an actual problem in operation and which can be referenced by similar projects.
出处
《洁净与空调技术》
2013年第3期76-78,共3页
Contamination Control & Air-Conditioning Technology
关键词
CVD还原车间
通风空调系统
设计
CVD recovery workshop
Ventilation and air-conditioning system
Design