摘要
主要介绍集成电路、液晶光电和薄膜太阳能等高科技制造行业中,工艺设备尾气除害用的废气处理装置Local Scrubber以及相关产品的分类、功能、原理、处理效率、日常维护、报警处理和相关环保法律法规等。
The waste geses treatment machine called Local Scrubber for exhaust treatment of process equipment used in the high-tech manufacture such as IC, liquid crystal photoelectric and solar energy film was introduced, along with the product categories, function, principle, treatment efficiency, daily maintenance, alarm response and associated environment protec- tion laws and regulations.
出处
《洁净与空调技术》
2013年第3期83-91,共9页
Contamination Control & Air-Conditioning Technology
